Ma, Z.Q; Ma, Z.Q; Wang, Y.L; Lan, Z.X; Zhao, L.; Xu, F.; … - 2022
The presence of silicon oxyphosphide in the heavily phosphorus-doped n + -type polycrystalline silicon film (poly Si … n + -poly-Si film, while high-resolution transmission electron microscopy (HR-TEM) with energy dispersive X-ray (EDX … implantation of as deposited intrinsic thin film through low pressure chemical vapor deposition (LPCVD) and recrystallization at …