AMHS capacity determination model for wafer fabrication based on production performance optimization
Year of publication: |
2013
|
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Authors: | Tu, Ying-mei ; Lu, Chun-wei ; Lee, Amy H. I. |
Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 51.2013, 18 (15.9.), p. 5520-5535
|
Subject: | AMHS | capacity planning | 300 mm semiconductor manufacturing | Kapazitätsplanung | Capacity planning | Halbleiterindustrie | Semiconductor industry | Produktionskapazität | Production capacity | Halbleiter | Semiconductor | Produktionsplanung | Production planning | Theorie | Theory | Produktivität | Productivity | Industrie | Manufacturing industries |
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