ARMAX model based run-to-run fault diagnosis approach for batch manufacturing process with metrology delay
Yan Wang, Ying Zheng, Huajing Fang and Yanwei Wang
| Year of publication: |
2014
|
|---|---|
| Authors: | Wang, Yan ; Zheng, Ying ; Fang, Huajing ; Wang, Yanwei |
| Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 52.2014, 10 (15.5.), p. 2915-2930
|
| Subject: | run-to-run fault diagnosis | EWMA controller | DEWMA controller | ARMAX | PRELS | Produktionssteuerung | Production control | Prozessmanagement | Business process management | Statistische Qualitätskontrolle | Statistical quality control | Qualitätsmanagement | Quality management |
| Extent: | graph. Darst. |
|---|---|
| Type of publication: | Article |
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10010354742