Carbon as a MEMS material : micro and nanofabrication of pyrolysed photoresist carbon
Chunlei Wang; Rabih Zaouk, Bejamin Y. Park and Marc J. Madou
| Year of publication: |
2008
|
|---|---|
| Authors: | Wang, Chunlei ; Zaouk, Rabih ; Park, Bejamin Y. ; Madou, Marc J. |
| Published in: |
International journal of manufacturing technology and management. - Milton Keynes [u.a.] : Inderscience Enterprises, ISSN 1368-2148, ZDB-ID 2037402-1. - Vol. 13.2008, 2/3/4, p. 360-375
|
| Subject: | Treibhausgas-Emissionen | Greenhouse gas emissions | Mikrosystemtechnik | Microsystems | Nanotechnologie | Nanotechnology |
| Extent: | Ill., graph. Darst. |
|---|---|
| Type of publication: | Article |
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10003641446