Carbon as a MEMS material : micro and nanofabrication of pyrolysed photoresist carbon
Chunlei Wang; Rabih Zaouk, Bejamin Y. Park and Marc J. Madou
| Year of publication: |
2008
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| Authors: | Wang, Chunlei ; Zaouk, Rabih ; Park, Bejamin Y. ; Madou, Marc J. |
| Published in: |
International journal of manufacturing technology and management. - Milton Keynes [u.a.] : Inderscience Enterprises, ISSN 1368-2148, ZDB-ID 20374021. - Vol. 13.2008, 2/3/4, p. 360-375
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| Extent: | Ill., graph. Darst. |
|---|---|
| Type of publication: | Article |
| Language: | English |
| Source: |
Persistent link: https://ebvufind01.dmz1.zbw.eu/10009873030