Constructing the OGE for promoting tool group productivity in semiconductor manufacturing
| Year of publication: |
2007
|
|---|---|
| Authors: | Chien, Chen-Fu ; Chen, Hsin-Kai ; Wu, Jei-Zheng ; Hu, Chih-Han |
| Published in: |
International journal of production research : American Institute of Industrial Engineers ; Society of Manufacturing Engineers. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 1604776. - Vol. 45.2007, 3, p. 509-524
|