INFLUENCE OF SUBSTRATE TEMPERATURE ON STRUCTURAL, ELECTRICAL AND OPTICAL PROPERTIES OF ITO THIN FILMS PREPARED BY RF MAGNETRON SPUTTERING
Year of publication: |
2013
|
---|---|
Authors: | HE, BO ; ZHAO, LEI ; XU, JING ; XING, HUAIZHONG ; XUE, SHAOLIN ; JIANG, MENG |
Published in: |
Surface Review and Letters (SRL). - World Scientific Publishing Co. Pte. Ltd., ISSN 1793-6667. - Vol. 20.2013, 05, p. 1350045-1
|
Publisher: |
World Scientific Publishing Co. Pte. Ltd. |
Subject: | Indium-tin-oxide (ITO) | RF magnetron sputtering | structure | electrical properties | optical properties |
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