Integration of a Synchrotron-based X-ray Lithography System
| Year of publication: |
1994
|
|---|---|
| Authors: | Li, Dz-Chi ; Sun, Cherng-Yuan ; Cullmann, Elmar |
| Published in: |
Journal of scientific and industrial research : JSIR. - New Delhi : Council, ISSN 0022-4456, ZDB-ID 4104080. - Vol. 53.1994, 10, p. 745-757
|