Modelling and Estimation of Wafer Yields and Defect Densities from Microelectronics Test Structure Data
| Year of publication: |
1996
|
|---|---|
| Authors: | Hansen, C.K. ; Thyregod, P. |
| Published in: |
Quality and reliability engineering international. - Chichester [u.a.] : Wiley, ISSN 0748-8017, ZDB-ID 506412. - Vol. 12.1996, 1, p. 9-18
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