Superfilling technology : transferring knowledge to industry from the National Institute of standards and technology
Year of publication: |
2011
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Authors: | Rowe, Brent R. ; Temple, Dorota S. |
Published in: |
The journal of technology transfer. - Norwell, Mass [u.a.] : Springer Science + Business Media, ISSN 0892-9912, ZDB-ID 1022920-6. - Vol. 36.2011, 1, p. 1-13
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Subject: | Technologiepolitik | Technology policy | Investitionspolitik | Investment policy | Technologietransfer | Technology transfer | Halbleiter | Semiconductor | Wirkungsanalyse | Impact assessment | USA | United States |
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