TOPOGRAPHICAL EVOLUTION OF MAGNETRON SPUTTERING Ti THIN FILMS DURING OXIDATION OBSERVED BY AFM
Year of publication: |
2011
|
---|---|
Authors: | LI, XINYUE ; JIN, YONGZHONG ; LIU, DONGLIANG ; ZENG, XIANGUANG ; YANG, RUISONG |
Published in: |
Surface Review and Letters (SRL). - World Scientific Publishing Co. Pte. Ltd., ISSN 1793-6667. - Vol. 18.2011, 01, p. 61-69
|
Publisher: |
World Scientific Publishing Co. Pte. Ltd. |
Subject: | Ti films | magnetron sputtering | oxidation | topographical evolution | atomic force microscopy |
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