//--> //--> //-->
Toggle navigation
Logout
Change account settings
EN
DE
ES
FR
A-Z
Beta
About EconBiz
News
Thesaurus (STW)
Research Skills
Help
EN
DE
ES
FR
My account
Logout
Change account settings
Login
Publications
Events
Your search terms
Search
Retain my current filters
~person:"Bhat, Rama B."
~person:"Kurfess, Thomas R."
~person:"Lim, H. S."
Search options
All Fields
Title
Exact title
Subject
Author
Institution
ISBN/ISSN
Published in...
Publisher
Open Access only
Advanced
Search history
My EconBiz
Favorites
Loans
Reservations
Fines
You are here:
Home
Search: subject_exact:"Microsystems"
Narrow search
Delete all filters
| 3 applied filters
Year of publication
From:
To:
Subject
All
Microsystems
3
Mikrosystemtechnik
3
Electronics
1
Elektronik
1
Industrie
1
Manufacturing industries
1
Optoelectronics industry
1
Optoelektronik-Industrie
1
more ...
less ...
Type of publication
All
Article
3
Type of publication (narrower categories)
All
Article in journal
3
Aufsatz in Zeitschrift
3
Language
All
English
3
Author
All
Bhat, Rama B.
Kurfess, Thomas R.
Lim, H. S.
Jonas, Michael
6
Berner, Marion
5
Bierhals, Rainer
3
Caspary, Sigrun
3
Jackson, Mark J.
3
Leimeister, Jan Marco
3
Nestle, Volker
3
Scholz-Reiter, Bernd
3
Shire, Karen A.
3
Lütjen, Michael
2
Alam, Sadiq M.
1
Bhaskar, Avinash K.
1
Bhattacharyya, B.
1
Bittner, Klaus
1
Brady, Mike P.
1
Brandkamp, Michael
1
Bromberg, Tabea
1
Chang, Yun
1
Chen, Fang
1
Cuhls, Kerstin
1
Doloi, B.
1
Dong, Ruifeng
1
Fahl, Petra
1
Frerichs, Alexandra
1
Freundt, Martin
1
Goch, Gert
1
Herrmann, Thomas
1
Huang, Her-Yueh
1
Hüntrup, Volker
1
Joshi, Suhas S.
1
Jou, Min
1
Kautt, Matthias
1
Kirchheim, Alice
1
Kirchhoff, Bruce A.
1
Kopylow, Christoph von
1
Kriegesmann, Bernd
1
Kriegsmann, Bernd
1
Kublik, Sebastian
1
more ...
less ...
Published in...
All
International journal of manufacturing technology and management
3
Source
All
ECONIS (ZBW)
3
Showing
1
-
3
of
3
Sort
relevance
articles prioritized
date (newest first)
date (oldest first)
1
Study of WEDM parameter phenomena for microfabrication
Alam, Sadiq M.
;
Rahman, Mustafizur
;
Lim, H. S.
- In:
International journal of manufacturing technology and …
13
(
2008
)
2/3/4
,
pp. 226-240
Persistent link: https://www.econbiz.de/10003641420
Saved in:
2
Bulk micromachining for SOI based microsystems using double side XeF2 etching
Bhaskar, Avinash K.
;
Packirisamy, Muthukumaran
;
Bhat, …
- In:
International journal of manufacturing technology and …
13
(
2008
)
2/3/4
,
pp. 297-307
Persistent link: https://www.econbiz.de/10003641433
Saved in:
3
Review of MEMS metrology solutions
Nichols, James F.
;
Shilling, Meghan
;
Kurfess, Thomas R.
- In:
International journal of manufacturing technology and …
13
(
2008
)
2/3/4
,
pp. 344-359
Persistent link: https://www.econbiz.de/10003641441
Saved in:
Results per page
10
25
50
100
250
A service of the
zbw
×
Loading...
//-->