Liu, Kang; Hu, Long; Dang, Xin; Li, Xin; Liu, Weihua; … - 2022
Refractory metal (Pd/Ge/Ti/Pt/Au) on semi-insulated GaAs (SI-GaAs) have been prepared and annealed at 380,400 and 425℃. Optical microscope and SEM images show that there is no significant difference in refractory metal surface morphology before and after annealing, compared with the standard...