LIM, DANIEL; SANTOSO, ERNA GONDO; TEH, KIM MING; WAN, … - In: Surface Review and Letters (SRL) 13 (2006) 06, pp. 795-802
Silicon has been widely used to fabricate microfluidic devices due to the dominance of silicon microfabrication technologies available. In this paper, theoretical analyses are carried out to suggest suitable laser machining parameters to achieve required channel geometries. Based on the...