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Search: subject:"Cluster tools"
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Scheduling problem
5
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Cluster analysis
3
Clusteranalyse
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3
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scheduling
3
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cluster tools
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Cluster tools
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General robot moving times
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K-Unit cycles
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Mixed integer linear programming
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Multi-cluster tools
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Petri net
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Robot
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Roboter
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cleaning operation
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modelling
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Bai, LiPing
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Fung, Richard Y. K.
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Li, Chao
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Li, Xin
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Liu, Ming-xiang
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Qiao, Yan
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International journal of production research
3
Computers & operations research : and their applications to problems of world concern ; an international journal
1
Journal of scheduling
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ECONIS (ZBW)
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1
Efficient scheduling approaches to time-constrained single-armed
cluster
tools
with condition-based chamber cleaning operations
Li, Chao
;
Yang, Fajun
;
Zhen, Lu
- In:
International journal of production research
60
(
2022
)
11
,
pp. 3555-3568
Persistent link: https://www.econbiz.de/10013499219
Saved in:
2
Optimal K-unit cycle scheduling of two-
cluster
tools
with residency constraints and general robot moving times
Li, Xin
;
Fung, Richard Y. K.
- In:
Journal of scheduling
19
(
2016
)
2
,
pp. 165-176
Persistent link: https://www.econbiz.de/10011458390
Saved in:
3
Cycle time analysis of dual-arm
cluster
tools
for wafer fabrication processes with multiple wafer revisiting times
Qiao, Yan
;
Wu, NaiQi
;
Zhu, QingHua
;
Bai, LiPing
- In:
Computers & operations research : and their …
53
(
2015
),
pp. 252-260
Persistent link: https://www.econbiz.de/10010493479
Saved in:
4
Modelling and scheduling analysis of multi-
cluster
tools
with residency constraints based on time constraint sets
Liu, Ming-xiang
;
Zhou, Bing Hai
- In:
International journal of production research
51
(
2013
)
16
,
pp. 4835-4852
Persistent link: https://www.econbiz.de/10010187250
Saved in:
5
Scheduling start-up and close-down periods of dual-armed
cluster
tools
with wafer delay regulation
Kim, Tae-kyu
;
Jung, Chihyun
;
Lee, Tae-eog
- In:
International journal of production research
50
(
2012
)
10
,
pp. 2785-2795
Persistent link: https://www.econbiz.de/10009575356
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