Toggle navigation
Logout
Change account settings
EN
DE
ES
FR
A-Z
Beta
About EconBiz
News
Thesaurus (STW)
Academic Skills
Help
EN
DE
ES
FR
My account
Logout
Change account settings
Login
Publications
Events
Your search terms
Search
Search options
All Fields
Title
Exact title
Subject
Author
Institution
ISBN/ISSN
Published in...
Publisher
Open Access only
Advanced
Search history
My EconBiz
Favorites
Loans
Reservations
Fines
You are here:
Home
Search: subject:"Sensor data mining"
Narrow search
Narrow search
Year of publication
From:
To:
Subject
All
Data visualization
1
Low yield diagnosis
1
Random forest
1
Root cause identification
1
Semiconductor manufacturing
1
Sensor data mining
1
Online availability
All
Undetermined
1
Type of publication
All
Article
1
Type of publication (narrower categories)
All
research-article
1
Language
All
English
1
Author
All
An, Jinwon
1
Cho, Hyun-Chang
1
Cho, Sungzoon
1
Kim, Eunji
1
Lee, Byeongeon
1
Published in...
All
Data Technologies and Applications
1
Source
All
Other ZBW resources
1
Showing
1
-
1
of
1
Sort
relevance
articles prioritized
date (newest first)
date (oldest first)
1
A
sensor
data
mining
process for identifying root causes associated with low yield in semiconductor manufacturing
Kim, Eunji
;
An, Jinwon
;
Cho, Hyun-Chang
;
Cho, Sungzoon
; …
- In:
Data Technologies and Applications
57
(
2023
)
3
,
pp. 397-417
the equipment. Design/methodology/approach This paper proposes a
sensor
data
mining
process based on the sequential …
Persistent link: https://www.econbiz.de/10014712738
Saved in:
Results per page
10
25
50
100
250
A service of the
zbw
×
Loading...
