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  • Search: subject:"direct tool-to-tool transportation"
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Subject
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AMHS 1 Taguchi methods 1 automated materials handling systems 1 direct tool-to-tool transportation 1 discrete event simulation 1 dual RSM 1 response surface methodology 1 semiconductor manufacturing 1 uniform design 1 wafer fabrication 1
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Article 1
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Cho, Chiwoon 1 Lin, Yu-Ru 1 Shen, Yu-An 1 Yang, Taho 1
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European Journal of Industrial Engineering 1
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RePEc 1
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The use of a simulation, a hybrid Taguchi, and dual response surface methods in the automated material handling system tool-to-tool strategy for a 300-mm fab
Yang, Taho; Shen, Yu-An; Cho, Chiwoon; Lin, Yu-Ru - In: European Journal of Industrial Engineering 6 (2012) 3, pp. 281-300
tool-to-tool transportation strategy. This paper aims to analyse the impact of direct tool-to-tool transportation. The … resources, allowing vehicles to travel directly between intrabay and interbay systems. This type of transportation is a direct …
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