RUSOP, M.; SOGA, T.; JIMBO, T.; UMENO, M.; SHARON, M. - In: Surface Review and Letters (SRL) 12 (2005) 04, pp. 587-595
with varying substrate temperature from 20 to 500°C. The effects of the substrate temperature and ambient nitrogen gas … substrate temperature (ST) and the a-CNx films with high nitrogen content have relatively high electrical resistivity. Also …