Vempaire, D.; Fruchart, D.; Gouttebarron, R.; Hlil, E.K.; … - In: Physica A: Statistical Mechanics and its Applications 358 (2005) 1, pp. 136-141
Plasma-based ion implantation was used to synthesize the manganese nitride Mn4N by implanting nitrogen in manganese layers first deposited by sputtering assisted by multi-dipolar microwave plasma. The structural characterization of the layer has been performed using X-ray diffraction at grazing...