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Bulk micromachining for SOI based microsystems using double side XeF2 etching
Bhaskar, Avinash K.; Packirisamy, Muthukumaran; Bhat, … - In: International journal of manufacturing technology and … 13 (2008) 2/3/4, pp. 297-307
Persistent link: https://www.econbiz.de/10009873034
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Wafer dicing strategic planning technique for clustered BioMEMS devices
Chandrasekaran, Arvind; Packirisamy, Muthukumaran - In: International journal of product development : IJPD 4 (2007) 3/4, pp. 296-309
Persistent link: https://www.econbiz.de/10009866354
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Hybrid bulk micro-machining process suitable for roughness reduction in optical MEMS devices
Chandrasekaran, Arvind; Packirisamy, Muthukumaran; … - In: International journal of manufacturing technology and … 9 (2006) 1-2, pp. 144-159
Persistent link: https://www.econbiz.de/10007287288
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Wafer dicing strategic planning technique for clustered BioMEMS devices
Chandrasekaran, Arvind; Packirisamy, Muthukumaran - In: International journal of product development : IJPD 4 (2007) 3/4, pp. 296-309
Persistent link: https://www.econbiz.de/10003442676