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Nanoscale particles and films of carbon nitride (CN) were synthesized on Si(100) substrates at room temperature by using simple plasma sputtering deposition techniques based on DC Glow Discharge with Hollow Cathode electrodes. The bonding structures of the films were investigated by X-ray...
Persistent link: https://www.econbiz.de/10005047108
Microscale to nanoscale carbon and carbon nitride particles and films were synthesized by using plasma discharge sputtering deposition techniques. Experimental results indicated that sizes and distributions of the particles were directly determined by both discharge voltage and bias voltage....
Persistent link: https://www.econbiz.de/10005080534