Diamond-like carbon nanostructures were prepared using Plasma enhanced chemical vapor deposition (PECVD). Temperature dependence of self-assembly of carbon nanostructures is noted. Carbon and silicon exhibit significant lattice mismatch and during the self-assembly, stacking of carbon atoms...

Plasma-enhanced chemical vapor deposition has been used to synthesize diamond-like carbon (DLC) thin films. High purity argon and methane gases were used as precursors for the fabrication of the DLC films. The influence of plasma pretreatment on the growth of the DLC films has been studied by...