Voltage Contrast Studies on 0.5 mm Integrated Circuits by Scanning Force Microscopy
Year of publication: |
1995
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Authors: | Böhm, C. ; Sprengepiel, J. ; Kubalek, E. |
Published in: |
Quality and reliability engineering international. - Chichester [u.a.] : Wiley, ISSN 0748-8017, ZDB-ID 506412. - Vol. 11.1995, 4, p. 253-256
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