A batching and scheduling algorithm for the diffusion area in semiconductor manufacturing
| Year of publication: |
2012
|
|---|---|
| Authors: | Yugma, Claude ; Dauzère-Péres, Stéphane ; Artigues, Christian ; Derreumaux, Alexandre ; Sibille, Olivier |
| Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 50.2012, 8 (15.4.), p. 2118-2132
|
| Subject: | batch scheduling | disjunctive graph | heuristics | semiconductor manufacture | simulated annealing | Scheduling-Verfahren | Scheduling problem | Halbleiterindustrie | Semiconductor industry | Heuristik | Heuristics | Algorithmus | Algorithm | Graphentheorie | Graph theory | Halbleiter | Semiconductor | Simulation | Produktionssteuerung | Production control | Produktionsplanung | Production planning |
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