A batching and scheduling algorithm for the diffusion area in semiconductor manufacturing
| Year of publication: |
2012
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|---|---|
| Authors: | Yugma, Claude ; Dauzre-Prs, Stphane ; Artigues, Christian ; Derreumaux, Alexandre ; Sibille, Olivier |
| Published in: |
International journal of production research : American Institute of Industrial Engineers ; Society of Manufacturing Engineers. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 1604776. - Vol. 50.2012, 8 (15.4.), p. 2118-2133
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