A general tool-based multi-product model for high-mixed production in semiconductor manufacturing
Liang Chen, Liuxing Chu, Cuicui Ge and Yueyuan Zhang
| Year of publication: |
2023
|
|---|---|
| Authors: | Chen, Liang ; Chu, Liuxing ; Ge, Cuicui ; Zhang, Yueyuan |
| Subject: | "tool-based" EWMA controller | disturbance estimation | high-mixed production | RTR control | semiconductor manufacturing | Halbleiterindustrie | Semiconductor industry | Halbleiter | Semiconductor | Theorie | Theory | Industrie | Manufacturing industries | Produktionsplanung | Production planning | Produktivität | Productivity | Produktionssteuerung | Production control |
| Type of publication: | Article |
|---|---|
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Other identifiers: | 10.1080/00207543.2022.2164088 [DOI] |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10014452595