A Monte Carlo study for electron elastic backscattering based on layered models for substrates

The Monte Carlo programme used for the simulation of electron transport is based on a description of the samples by a layered model. The simulation accounts for the elastic scattering of electrons in selected materials and provides results to process the experimental data. In this paper, we present a detailed calculation method for determining the probabilities of elastic scattering by atoms, depending on the energy of the electrons. Reported results indicate that the accuracy of surface analysis can be improved by application of the developed Monte Carlo algorithm.