A multivariate parameter trace analysis for online fault detection in a semiconductor etch tool
Jong Myoung Ko and Chang Ouk Kim
| Year of publication: |
2012
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|---|---|
| Authors: | Ko, Jong Myoung ; Kim, Chang Ouk |
| Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 50.2012, 23 (1.12.), p. 6639-6654
|
| Subject: | dynamic time warping | Kalman filtering | multivariate analysis | recursive T 2 update | semiconductor manufacturing tool | tool fault detection | tool parameter traces. | Multivariate Analyse | Multivariate analysis | Halbleiterindustrie | Semiconductor industry | Zeitreihenanalyse | Time series analysis | Halbleiter | Semiconductor | Schätztheorie | Estimation theory |
| Extent: | graph. Darst. |
|---|---|
| Type of publication: | Article |
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10009673530