A new ViT-Based augmentation framework for wafer map defect classification to enhance the resilience of semiconductor supply chains
Shu-Kai S. Fan, Shang-Hao Chiu
| Year of publication: |
2024
|
|---|---|
| Authors: | Fan, Shu-Kai S. ; Chiu, Shang-Hao |
| Subject: | Semiconductor supply chain | Vision transformer (ViT) | Data augmentation | Wafer defect pattern classification | Deep learning | Lieferkette | Supply chain | Halbleiterindustrie | Semiconductor industry | Halbleiter | Semiconductor | Klassifikation | Classification |
Online Resource
| Type of publication: | Article |
|---|---|
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Other identifiers: | 10.1016/j.ijpe.2024.109275 [DOI] |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10015051429