A run-to-run controller for product surface quality improvement
Lulu Bao, Kaibo Wang and Tianying Wu
| Year of publication: |
2014
|
|---|---|
| Authors: | Bao, Lulu ; Wang, Kaibo ; Wu, Tianying |
| Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 52.2014, 15 (1.8.), p. 4469-4487
|
| Subject: | Kriging | process modelling | run-to-run control | silicon wafer | Qualitätsmanagement | Quality management | Produktionssteuerung | Production control | Theorie | Theory | Prozessmanagement | Business process management |
| Extent: | Ill., graph. Darst. |
|---|---|
| Type of publication: | Article |
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10010401394