A spatial rule adaptation procedure for reliable production control in a wafer fabrication system
| Year of publication: |
1998
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|---|---|
| Authors: | Baek, D.H. ; Yoon, W.C. ; Park, S.C. |
| Published in: |
International journal of production research : American Institute of Industrial Engineers ; Society of Manufacturing Engineers. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 1604776. - Vol. 36.1998, 6, p. 1475-1492
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