A spatial variable selection method for monitoring product surface
Year of publication: |
1-15 July 2016
|
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Authors: | Wang, Kaibo ; Jiang, Wei ; Li, Bo |
Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 54.2016, 13/14 (1/15.7.), p. 4161-4181
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Subject: | LASSO | semiconductor manufacturing | spatial clustering | statistical process control | Halbleiterindustrie | Semiconductor industry | Statistische Methode | Statistical method | Modellierung | Scientific modelling | USA | United States | Theorie | Theory | Regionales Cluster | Regional cluster |
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