A systems approach to photolithography process optimization in an electronics manufacturing environment
| Year of publication: |
2000
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|---|---|
| Authors: | Doniavi, A. ; Mileham, A.R. ; Newnes, L.B. |
| Published in: |
International journal of production research : American Institute of Industrial Engineers ; Society of Manufacturing Engineers. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 1604776. - Vol. 38.2000, 11, p. 2515-2528
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