Advanced virtual metrology using distribution alignment loss for practical quality control
Yu Gyeong Ji, In Ho Kim, Minjeong Shin, Gyeong Taek Lee and Jaeyeon Jang
| Year of publication: |
2025
|
|---|---|
| Authors: | Ji, Yu Gyeong ; Kim, In Ho ; Shin, Minjeong ; Lee, Gyeong Taek ; Jang, Jaeyeon |
| Published in: |
International journal of production research. - London [u.a.] : Taylor & Francis, ISSN 1366-588X, ZDB-ID 1485085-0. - Vol. 63.2025, 23, p. 9051-9069
|
| Subject: | deep learning | distribution alignment loss | process stability | Semiconductor manufacturing | virtual metrology | Qualitätsmanagement | Quality management | Virtuelle Organisation | Virtual organization | Halbleiterindustrie | Semiconductor industry | Prozessmanagement | Business process management |
| Type of publication: | Article |
|---|---|
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Other identifiers: | 10.1080/00207543.2025.2532147 [DOI] |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10015555580