CdS NANORODS FABRICATED BY ICP-ASSISTED MAGNETRON SPUTTERING AT ROOM TEMPERATURE

Cadmium sulfide (CdS) nanocrystals are successfully fabricated on glass and silicon substrates at room temperature with low-frequency (460 kHz) inductively coupled plasma assisted magnetron sputtering technique. Both size and shape can be controlled by changing deposition parameters and substrates. Field-emission scanning electron microscope, energy dispersive X-ray spectroscopy, and X-ray diffraction are adopted to measure the properties of CdS nanorods.