Extent:
XVIII, 238 S
graph. Darst
24 cm
Type of publication: Book / Working Paper
Language: English
Notes:
Includes bibliographical references (p. 223-232) and index
Pp. : DM 129.00
ISBN: 4-431-70266-0
Classification: Halbleitertechnologie
Source:
ECONIS - Online Catalogue of the ZBW
Persistent link: https://www.econbiz.de/10001393785