COMPUTATIONAL FLUID DYNAMICS ANALYSIS OF FABRICATED MICRONOZZLE FOR SUPERSONIC PARTICLE DEPOSITION
Year of publication: |
2010
|
---|---|
Authors: | JUNG, KYUBONG ; SONG, WOOJIN ; CHUN, DOO-MAN ; YEO, JUN-CHEOL ; KIM, MIN-SAENG ; AHN, SUNG-HOON ; LEE, CAROLINE SUNYONG |
Published in: |
Surface Review and Letters (SRL). - World Scientific Publishing Co. Pte. Ltd., ISSN 1793-6667. - Vol. 17.2010, 01, p. 45-49
|
Publisher: |
World Scientific Publishing Co. Pte. Ltd. |
Subject: | Bosch process | nanoparticle deposition system (NPDS) | micronozzle | deep reactive-ion etching (DRIE) | computational fluid dynamics (CFD) |
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