Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times
Yan Qiao; NaiQi Wu; QingHua Zhu; LiPing Bai
| Year of publication: |
2015
|
|---|---|
| Authors: | Qiao, Yan ; Wu, NaiQi ; Zhu, QingHua ; Bai, LiPing |
| Published in: |
Computers & operations research : and their applications to problems of world concern ; an international journal. - Oxford [u.a.] : Elsevier, ISSN 0305-0548, ZDB-ID 194012-0. - Vol. 53.2015, p. 252-260
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| Subject: | Scheduling | Cluster tools | Semiconductor manufacturing | Petri net | Halbleiterindustrie | Semiconductor industry | Scheduling-Verfahren | Scheduling problem | Graphentheorie | Graph theory | Regionales Cluster | Regional cluster | Clusteranalyse | Cluster analysis | Durchlaufzeit | Lead time | Algorithmus | Algorithm | Prozessmanagement | Business process management | Halbleiter | Semiconductor |
| Extent: | graph. Darst. |
|---|---|
| Type of publication: | Article |
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10010493479