Cycle time simulation study for cluster tool operation in IC fabrication
Year of publication: |
2011
|
---|---|
Authors: | Gupta, Amit Kumar ; Appa Iyer Sivakumar ; Lendermann, Peter |
Published in: |
International journal of manufacturing technology and management. - Milton Keynes [u.a.] : Inderscience Enterprises, ISSN 1368-2148, ZDB-ID 2037402-1. - Vol. 23.2011, 3/4, p. 179-192
|
Subject: | Simulation | Regionales Cluster | Regional cluster | Durchlaufzeit | Lead time |
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