Cycle time simulation study for cluster tool operation in IC fabrication
Amit Kumar Gupta; Appa Iyer Sivakumar; Peter Lendermann
| Year of publication: |
2011
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|---|---|
| Authors: | Gupta, Amit Kumar ; Sivakumar, Appa Iyer ; Lendermann, Peter |
| Published in: |
International journal of manufacturing technology and management. - Milton Keynes [u.a.] : Inderscience Enterprises, ISSN 1368-2148, ZDB-ID 20374021. - Vol. 23.2011, 3/4, p. 179-192
|
| Extent: | Ill., graph. Darst. |
|---|---|
| Type of publication: | Article |
| Language: | English |
| Source: |
Persistent link: https://www.econbiz.de/10009873280