Efficient scheduling approaches to time-constrained single-armed cluster tools with condition-based chamber cleaning operations
Chao Li, Fajun Yang and Lu Zhen
| Year of publication: |
2022
|
|---|---|
| Authors: | Li, Chao ; Yang, Fajun ; Zhen, Lu |
| Subject: | cleaning operation | cluster tools | scheduling | Semiconductor manufacturing | time-constrained | Scheduling-Verfahren | Scheduling problem | Halbleiterindustrie | Semiconductor industry | Regionales Cluster | Regional cluster | Clusteranalyse | Cluster analysis | Algorithmus | Algorithm |
Online Resource
| Type of publication: | Article |
|---|---|
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Other identifiers: | 10.1080/00207543.2021.1926568 [DOI] |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10013499219