Front-end process modeling in silicon
| Year of publication: |
2009
|
|---|---|
| Authors: | Pelaz, L. ; Marqués, L. A. ; Aboy, M. ; López, P. ; Santos, I. |
| Published in: |
The European Physical Journal B - Condensed Matter and Complex Systems. - Springer. - Vol. 72.2009, 3, p. 323-359
|
| Publisher: |
Springer |
| Extent: | text/html |
|---|---|
| Type of publication: | Article |
| Source: |
Persistent link: https://www.econbiz.de/10009280016