Hybrid bulk micro-machining process suitable for roughness reduction in optical MEMS devices
| Year of publication: |
2006
|
|---|---|
| Authors: | Chandrasekaran, Arvind ; Packirisamy, Muthukumaran ; Stiharu, Ion ; Delage, Andre |
| Published in: |
International journal of manufacturing technology and management. - Milton Keynes [u.a.] : Inderscience Enterprises, ISSN 1368-2148, ZDB-ID 20374021. - Vol. 9.2006, 1-2, p. 144-159
|