Integration of run-to-run control schemes and on-line experiement to deal with the changes in semiconducting dynamic processes
Chih-Hung Jen, Bernard C. Jiang and Chien-Chih Wang
| Year of publication: |
2011
|
|---|---|
| Authors: | Jen, Chih-hung ; Jiang, Bernard C. ; Wang, Chien-chih |
| Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 49.2011, 19/21 (1/1.10/11.), p. 5657-5678
|
| Subject: | Halbleiterindustrie | Semiconductor industry | Produktionssteuerung | Production control | Statistische Qualitätskontrolle | Statistical quality control | Simulation |
| Extent: | graph. Darst. |
|---|---|
| Type of publication: | Article |
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10009348746