Integration of run-to-run control schemes and on-line experiment to deal with the changes in semiconducting dynamic processes
| Year of publication: |
2011
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|---|---|
| Authors: | Jen, Chih-Hung ; Jiang, Bernard C. ; Wang, Chien-Chih |
| Published in: |
International journal of production research : American Institute of Industrial Engineers ; Society of Manufacturing Engineers. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 1604776. - Vol. 49.2011, 19 (1.10.), p. 5657-5679
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