Minimising idle times in cluster tools in the semiconductor industry
| Year of publication: |
2010
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|---|---|
| Authors: | Lati, N. ; Gilad, I. |
| Published in: |
International journal of production research : American Institute of Industrial Engineers ; Society of Manufacturing Engineers. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 1604776. - Vol. 48.2010, 21, p. 6443-6460
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