Multi-step virtual metrology for semiconductor manufacturing : a multilevel and regularization methods-based approach
Gian Antonio Susto; Simone Pampuri; Andrea Schirru; Alessandro Beghi; Giuseppe De Nicolao
| Year of publication: |
2015
|
|---|---|
| Authors: | Susto, Gian Antonio ; Pampuri, Simone ; Schirru, Andrea ; Beghi, Alessandro ; De Nicolao, Giuseppe |
| Published in: |
Computers & operations research : and their applications to problems of world concern ; an international journal. - Oxford [u.a.] : Elsevier, ISSN 0305-0548, ZDB-ID 194012-0. - Vol. 53.2015, p. 328-337
|
| Subject: | Chemical vapor deposition | Etching | Industry automation | LASSO | Lithography | Regularization methods | Ridge regression | Semiconductor manufacturing | Statistical modeling | Virtual metrology | Halbleiterindustrie | Semiconductor industry | Halbleiter | Semiconductor | Schätztheorie | Estimation theory | Regressionsanalyse | Regression analysis | Automatisierung | Automation | Industrie | Manufacturing industries |
| Extent: | graph. Darst. |
|---|---|
| Type of publication: | Article |
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10010493468