Online parameter estimation and run-to-run process adjustment using categorical observations
Year of publication: |
2011
|
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Authors: | Lin, Jing ; Wang, Kaibo |
Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 49.2011, 12/13 (15/1.6/7.), p. 4103-4117
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Subject: | Halbleiterindustrie | Semiconductor industry | Produktionssteuerung | Production control | Qualitätsmanagement | Quality management | Theorie | Theory |
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