Performance assessment of run-to-run control in semiconductor manufacturing based on IMC framework
Liang Chen, Mingda Ma, Shi-Shang Jang, David Shan-Hill Wang and Shuqing Wang
| Year of publication: |
2009
|
|---|---|
| Authors: | Chen, Liang ; Ma, Mingda ; Jang, Shi-shang ; Wang, David Shan-hill ; Wang, Shuqing |
| Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 47.2009, 15 (1.8.), p. 4173-4199
|
| Subject: | Halbleiterindustrie | Semiconductor industry | Performance-Messung | Performance measurement | Halbleiter | Semiconductor | Industrie | Manufacturing industries |
| Extent: | graph. Darst. |
|---|---|
| Type of publication: | Article |
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10003890720