Run-to-run control and state estimation in high-mix semiconductor manufacturing
| Year of publication: |
2007
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|---|---|
| Authors: | Bode, C.A. ; Wang, J. ; He, Q.P. ; Edgar, T.F. |
| Published in: |
Annual reviews in control : a journal of FIFAC, the International Federation of Automatic Control. - Oxford [u.a.] : Elsevier Science, ISSN 1367-5788, ZDB-ID 14039849. - Vol. 31.2007, 2, p. 241-254
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